23 September 2006

Aerotech's new rotary air-bearing positioning stage

"With its brushless direct-drive motor, integral precision encoder and an air bearing design combining high stiffness with exceptionally low axial, radial and tilt error motion, our new ABRS series rotary stage represents the ultimate in high precision angular positioning," said Cliff Jolliffe of Aerotech.

The new series is available in four sizes with nominal, square dimensions (width x depth) of 150 mm, 200 mm, 250 mm and 300 mm. Table tops have diameters of approximately 20 mm less than the width and each model includes a 360 degree reference scale. The maximum positioning resolution on the largest stage is 0.174 ┬Árad (0.036 arc-sec) with speeds up to 500 rpm. Aimed at demanding high-throughput production and inspection applications, including semiconductor manufacture, optical metrology and nanotechnology device fabrication, the new range combines ultra-smooth and precise angular motion with extreme positioning stability and has further benefits of a very long life with virtually zero maintenance.

To ensure minimal stack-height related errors in multi axis positioning applications (caused by the effect of individual angular pitch, yaw and roll errors that culminate in a compound error at the point of measurement or reference), the ABRS has been designed with an extremely low height for an air bearing design. With overall height dimensions of only 80 mm, 90 mm, 100 mm and 110 mm, each model also includes a clear aperture for product feed-through, laser beam delivery or for general clearance. Construction material is aluminium, with a hard-coat finish for maximum durability.

Contact: Cliff Jolliffe

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