The LPXpro excimer laser product line is now adjusted in its third generation to the environmentally-friendly requirements of the RoHS directive. It offers a completely revised controller unit and extended warranties. The lasers feature the best gas and component lifetimes at the market due to clean room production technology. Most flexible operation rages allow operation at 193 nm, 248 nm or 351 nm, the C-version has a special 308 nm configuration. 157 nm are available with the dedicated LPFpro series.
Due to its wavelength and the short pulse length a broad range of applications like micromaching, PLD, LDP, LIDAR and annealing can be processed with these lasers.
Please visit: www.coherent.com/excimer for more information.