Coherent Inc. has introduced the VYPER, a novel excimer laser annealing (ELA) system which enables volume production of low temperature poly-silicon (LTPS) for next generation flat panel displays. In particular, LTPS is the key component for energy efficient and light weight liquid crystal displays (LCD) and organic light-emitting diode (OLED) displays for smart phones and tablet-PCs.
The new, top of the line product mates the kW class VYPER excimer laser together with enhanced LineBeam optics to deliver a scalable platform that allows LTPS display manufacturers to seamlessly transition from the current panel generation (Gen 4) to Gen 6, which enhances throughput significantly. Plus, the advanced design and capabilities of the VYPER support designs through Gen 8, thus permitting manufacturers to also meet future stringent cost targets.
“Today the vast majority of mobile displays are manufactured with Coherent excimer lasers and LineBeam optical systems” said Richard Waldermann, Vice President of Coherent, “With the scaling of power and line lengths, we are seeing strong adoption of the VYPER systems, enabling cost effective production of larger panel sizes up to Gen 8, and we anticipate that the proven Coherent ELA based LTPS technology will continue as the process of choice for the rapidly growing high resolution display market”.